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Small and medium-sized batch equipment
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- Small and medium-sized batch equipment
For Small lot production of electronic components, research aplication, and medical device product
AP-300/600 System
Ideal for research and development applications in a table-top / compact tabletop type
The AP-300/600 system is the equipment which made refine more small and popular old PX-250/500 system. The system becomes more friendly to the user by touch panel operation. Recipe condition setting becomes possible more widely than the past, and it can corresponds to various processes by various types of electrode choice.
AP-1000 System
Wide range to medium volume production with a minimum area by the all-in-one / Pump
The AP-1000 system is the equipment which made refine more old PX-1000 systems as an all-in-one system, keeping the compatibility. The system becomes more friendly to the user by touch panel operation. High frequency generator can choose standard 600W and optional 1000W. It can corresponds to various processes by various types of electrode choice as with AP-300/600 system.
| Specification / models | AP-300 | AP-600 | AP-1000 |
|---|---|---|---|
| Footprint | 569W×704H×869D(mm) | 697W×1513H×1127D(mm) | |
| Chamber size | 267W×267H×465D(mm) | 406W×267H×465D(mm) | 457W×457H×610D(mm) |
| Electrode Dimensions ・Powered Electrode Dimensions ・Ground Electrode Dimensions |
190W×330D(mm) 229W×330D(mm) |
330W×330D(mm) 368W×330D(mm) |
349W×425D(mm) 384W×425D(mm) |
| The recommended maximum processing slot | 2-stage | 2-stage | 3-stage |
| RF power | 300Ｗ | 600Ｗ | 600Ｗ （1000W Option） |
| Gas control MFC | Standard：2（Maximum Number of MFCs：4） | ||
| Control System | PLC, touch screen interface | ||
| Vacuum pump | rotary pump(Possible changes to the dry pump in option） | ||
| Place outside | Body built-in | ||
| Equipment weight | 221kg | 221kg | 485kg |