Small and medium-sized batch equipment
For Small lot production of electronic components, research aplication, and medical device product
Ideal for research and development applications in a table-top / compact tabletop type
The AP-300/600 system is the equipment which made refine more small and popular old PX-250/500 system. The system becomes more friendly to the user by touch panel operation. Recipe condition setting becomes possible more widely than the past, and it can corresponds to various processes by various types of electrode choice.
Wide range to medium volume production with a minimum area by the all-in-one / Pump
The AP-1000 system is the equipment which made refine more old PX-1000 systems as an all-in-one system, keeping the compatibility. The system becomes more friendly to the user by touch panel operation. High frequency generator can choose standard 600W and optional 1000W. It can corresponds to various processes by various types of electrode choice as with AP-300/600 system.
|Specification / models
・Powered Electrode Dimensions
・Ground Electrode Dimensions
|The recommended maximum processing slot
|Gas control MFC
|Standard：2（Maximum Number of MFCs：4）
|PLC, touch screen interface
|rotary pump(Possible changes to the dry pump in option）