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Automated,Material handling system
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Inline correspondence, automated correspondence
FlexTRAK System
Scalable stand-alone unit in accordance with the production form
FlexTRAK The system is may be used alone, get to use it as a unit corresponding to the communication protocol such as SMEMA / SECS so that it can be custom-up to the material handling system and integrated system to suit your production process it is possible. Up to have a space that corresponds to the cleaning process of up to 300mm wafers. Also it has a lineup FlexTRAK-S system with twice the space in the chamber.
| Specification / models | FlexTRAK | FlexTRAK-S |
|---|---|---|
| Footprint | 382W×1595H×1210D(mm) | |
| Enable processing area | 305W×305D(mm) | 305W×560D(mm) |
| RF power | 600W | 600W （1000W Option） |
| Gas control MFC | Standard：2（Maximum Number of MFCs：4） | |
| Control System | PLC, touch screen interface | |
| Vacuum pump | Dry Pump（Body built-in） | |
| Equipment weight | 275kg | 315kg |
FlexTRAK-CD System
Mass production processing device corresponding to the cassette to cassette system in a space-saving
FlexTRAK-CD system is the equipment of an automatic type specialized in mass production with a system to take a processing work out and return it to the original location after plasma processing automatically from at most 5 substrate (or part tray) store cassettes. The system achieves high throughput in spite of ministry space, and this doesn't see the other kinds. TropoSPHERE system which corresponds to wafer automatic processing up to at most 8 inches is also lined up.
| Specification / models | FlexTRAK-CD | FlexTRAK-CDS |
|---|---|---|
| Footprint | 1068W×1600H×1166D(mm) | 1190W×1640H×1320D(mm) |
| Enable processing area | 305W×305D(mm) | 305W×550D(mm) |
| RF power | 600W | 600Ｗ （1000W Option） |
| Gas control MFC | Standard：2（Maximum Number of MFCs：4） | |
| Control System | PLC, touch screen interface | |
| Simultaneous processing maximum number of substrates (Varies depending on size) |
5 seets | 10 seets |
| Equipment weight | 430kg | 550kg |